ZYGO, a leading company in technology and application support in heterodyne displacement interferometry, offers complete solutions and support for OEM metrology application with its ZMI™ Series Displacement Measuring Interferometers. The OEM products and technologies from ZYGO have been field proven for several years of use in leading-edge production facilities.
Key Features
The main features of the ZMI™ series include:
- Highly robust for OEM applications
- Heterodyne displacement interferometry
- Highly stable, easy to align, and insensitive to signal amplitude changes
- A single laser source capable of supporting multiple axes
- High signal to noise phase measurements enable high precision and remove false counts, even at zero slew rates
Typical Applications
Following are the typical applications of the ZMI™ series:
- Metrology tools: Mask, wafer, and LCD measurement and inspection tools, and CD-SEMs
- Lithography tools: e-beam and laser mask writers, scanners and optical steppers
- Calibration: Measurement and calibration of high frequency or high resolution mechanical motions
- Process equipment: die bonders, drilling tools, memory repair tools, and probers
Configure the system to suit specific requirements:
ZYGO offers a wide range of
- Feedthroughs and cables
- Measurement electronics
- Optics and interferometers
- Laser heads
This modular approach allows the user to configure a system that perfectly suits their needs by selecting the most suitable components.