Modular Process Technology

Modular Process Technology - Semiconductor Equipment Manufacturer of Rapid Thermal Processing Systems (RTP) for 300mm, 200mm and 150mm Wafers. Modular Process Technology also offers used, refurbished RTP-600S systems. Some of these pre-owned systems are available with a full one year, new system warranty. Please contact us for pricing and availability.

Modular Process Technology is a semiconductor equipment manufacturer of Rapid Thermal Processing Systems, hybrid UV-RTP systems, and stand alone UV Ozone Cleaning Systems. There are many unique features incorporated into our product lines which make our products attractive to advanced research and development and manufacturing. Modular Process Technology has in-depth experience in fundamental materials science research and process development. Our extensive process technology is reflected in the quality of our system design and integration.