Plasma-Therm

At Plasma-Therm, we’ve been innovating plasma processing technologies since 1974.

We design and build easy-to-use wafer processing platforms for standard and advanced processes used in microelectronics manufacturing and R&D applications. Our platforms are the centerpiece of our application solutions and cover a wide variety of process steps including etch, deposition, material modification, and die singulation. In addition, our platforms are configurable to help you get the equipment and features you need.

Since the very beginning, we’ve focused on developing plasma-based technologies and equipment processing tools that deliver excellent value. That is our calling card. We grew organically through acquisitions and strategic partnerships so we could offer broader solutions. Today, we are a solid, reliable, and trusted partner. From 300mm on down the line, you get proven system solutions at a competitive price/value equation, with process knowledge and service attention that will exceed your expectations.