Nova Measuring Instruments Inc.

Nova Measuring Instruments Ltd. is a leading global semiconductor equipment manufacturer with solutions and services that are used by 21 of the largest 25 IC manufacturers. Nova’s expertise in Thin Film and Optical CD & shape profiling metrology systems are addressing the complex measurement and process control challenges of High Volume Production in 300 & 200 mm IC manufacturing, from 90nm to the demanding 45nm and 32nm technology nodes.

Nova’s metrology systems, based on patented normal incidence spectroscopic scatterometry, provide full Optical CD and shape profiling for 2D and 3D structures on test pads and in-die. Nova’s metrology products feature industry-leading fleet matching and the highest throughput, providing both Stand-Alone and Integrated Metrology Optical CD and shape profiling solutions for technology nodes down to 32nm. Both SA and IM architectures are fully compatible in recipe transferability and fleet matching.

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